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Publications by Kenneth A. Goldberg
Increased Depth of Field Through Wave-Front Coding: Using an Off-Axis Zone Plate Lens With Cubic Phase Modulation in an EUV Microscope
Design Optimization of Bendable X-Ray Mirrors
Pushing Extreme Ultraviolet Lithography Development Beyond 22 Nm Half Pitch
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Interferometric At-Wavelength Flare Characterization of Extreme Ultraviolet Optical Systems
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Extreme Ultraviolet Alignment and Testing of a Four-Mirror Ring Field Extreme Ultraviolet Optical System
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Extreme Ultraviolet Interferometry
