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Publications by Ki‐Sung Kim

Preparation of Cubic Boron Nitride Thin Film by the Helicon Wave Plasma Enhanced Chemical Vapor Deposition

Applied Physics Letters

English

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Preparation of Titanium Nitride Films by Plasma-Enhanced Chemical Vapor Deposition (II)

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Preparation of Boron Nitride Thin Films by Using Plasma Chemical Transport of Boron.

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Deposition of Titanium Nitride on Porous Glass by Plasma-Enhanced Chemical Vapor Deposition.

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Plasma-Enhanced Chemical Vapor Deposition of Boron Nitride Thin Films From B2H6–H2–NH3 and B2H6–N2 Gas Mixtures

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

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Preparation of Thin Dielectric Films by Plasma-Assisted Chemical Vapor Deposition of Hexamethyldisilazane.

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Formation of Cubic Boron Nitride by the Reactive Sputter Deposition of Boron

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Mechanical Properties of B(C,N) Thin Film by Plasma-Assisted Chemical Vapor Deposition.

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Synthesis of Cubic Boron Nitride Film.

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Forming Silicon Carbon Nitride Crystals and Silicon Carbon Nitride Nanotubes by Microwave Plasma-Enhanced Chemical Vapor Deposition

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