Discover open access scientific publications

Search, annotate, share and cite publications

Publications by Kiyoshi AKAMATSU

Mirror Polishing of Silicon Wafers (4th Report)

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

Mechanical Engineering

English

Related publications

Grinding and Abrasion-Part II. Chemical Mechanical Polishing of Silicon Wafers.

English

A Study of Polishing of Silicon Wafers and Processing by an AFM Using Tetra-Mechyl-Ammonium-Hydroxide(TMAH).

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

Mechanical Engineering

English

Monocrystalline Silicon Carbide Wafers Processing

Mordovia University Bulletin

English

Surface Grafting of Polypyrrole Onto Silicon Wafers

Chemistry Letters

English

A Novel Approach of Chemical Mechanical Polishing for Cadmium Zinc Telluride Wafers

Scientific Reports

Multidisciplinary

English

Mo Contamination Inp/P+Epitaxial Silicon Wafers

Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

English

Effect of Ultrasonic Strain on P-Type Silicon Wafers

Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

English

Surface Damage Effects in Ultrasonic Cleaning of Silicon Wafers

English

Comparison Between Different Ways in Making Silicon Dioxide Layer on Silicon Wafers

MATEC Web of Conferences

Materials Science

English