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Publications by Koh MATSUMOTO
Lecture Course on Vacuum Technology. Experiments on Ultrahigh Vacuum. 2. Materials. 4. Gas Materials and Their Technological Applications. 5.
SHINKU
Proposal of Near-Infrared Laser Diode Spectroscopy at 1.74.MU.m for HCl Monitor in Semiconductor Processes.
SHINKU
Related publications
Vacuum Engineering and Materials Science.
SHINKU
Report on “10th Introductory Course on Practical Vacuum Science and Technology”
Vacuum and Surface Science
Vacuum-Ultraviolet Light Sources and Their Applications for Processings. A Review of the Present Status and Future Prospects on Materials Processing Using Vacuum-Ultraviolet Light.
Hyomen Kagaku
Vacuum Technology: Keys and Applications. Introduction of Reactive Gas, Toxic Gas and Very Small Flow Rate Gas Into Vacuum Chamber.
SHINKU
Some Experiments on Vacuum Distillation
Proceedings of the Royal Society of London. Series A, Containing Papers of a Mathematical and Physical Character
Vacuum and Ultrahigh Vacuum for Particle Accelerators and Storage Rings
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
Engineering
Astronomy
Physics
Report on Vacuum Experiments for Elementary School Students and Their Parental Guardians
Vacuum and Surface Science
Vacuum-Ultraviolet Light Sources and Their Applications for Processings. Thin Film Preparation Using Vacuum Ultraviolet Rare Gas Excimer Lamps.
Hyomen Kagaku
Vacuum Technology: Keys and Applications. Vacuum System for the SPring-8 Storage Ring.
SHINKU
