Amanote Research
Register
Sign In
Discover open access scientific publications
Search, annotate, share and cite publications
Publications by Kun-Pei Liu
Oxygen Quenching Effect in Ultra-Deep X-Ray Lithography With SU-8 Resist
Journal of Micromechanics and Microengineering
Mechanics of Materials
Electronic Engineering
Mechanical Engineering
Nanoscience
Optical
Electrical
Magnetic Materials
Nanotechnology
Electronic
Related publications
X-Ray Lenses Fabricated by Deep X-Ray Lithography
Validation of X-Ray Lithography and Development Simulation System for Moving Mask Deep X-Ray Lithography
Journal of Microelectromechanical Systems
Electronic Engineering
Electrical
Mechanical Engineering
Use of Photosensitive Polyimide for Deep X‐ray Lithography
Applied Physics Letters
Astronomy
Physics
Fabrication of Tapered Micropillars With High Aspect-Ratio Based on Deep X-Ray Lithography
Materials
Materials Science
Condensed Matter Physics
Fabrication of Multimode Polymeric Waveguides and Micromirrors Using Deep X-Ray Lithography
IEEE Photonics Technology Letters
Electronic Engineering
Optics
Molecular Physics,
Optical
Electrical
Atomic
Magnetic Materials
Electronic
Micro Capillary Array Chip for DNA Analysis Fabricated by Deep X-Ray Lithography
IEEJ Transactions on Sensors and Micromachines
Electronic Engineering
Electrical
Mechanical Engineering
X-Ray Lithography Sources: A Review
O-Nitrobenzyl Ester Based Deep UV Resist for KrF Excimer Laser Lithography
Polymer Journal
Polymers
Materials Chemistry
Plastics
Quantifying Reaction Spread and X-Ray Exposure Sensitivity in Hydrogen Silsesquioxane Latent Resist Patterns With X-Ray Spectromicroscopy
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Surfaces
Electronic Engineering
Condensed Matter Physics
Instrumentation
Electronic
Optical
Materials Chemistry
Electrical
Magnetic Materials
Films
Process Chemistry
Coatings
Technology
