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Publications by Li-Jui Chen
Focus Latitude Enhancement of Symmetrical Phase Mask Design for Deep Submicron Contact Hole Patterning
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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Flying Phase Mask for the Printing of Long Submicron-Period Stitchingless Gratings
Microelectronic Engineering
Surfaces
Electronic Engineering
Condensed Matter Physics
Electronic
Molecular Physics,
Nanoscience
Optical
Electrical
Atomic
Magnetic Materials
Films
Nanotechnology
Optics
Coatings
Design and Assessment of Symmetrical Phase-Shifting Algorithms
Journal of the Optical Society of America A: Optics and Image Science, and Vision
Pattern Recognition
Optics
Molecular Physics,
Computer Vision
Optical
Atomic
Magnetic Materials
Medicine
Electronic
Directed Self Assembly Materials for Hole Patterning
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Multiple Patterning of Laser Focus Spot Using a Segmented Kinoform Phase Plate
The Review of Laser Engineering
Nanoparticle Chemisorption Printing Technique for Conductive Silver Patterning With Submicron Resolution
Nature Communications
Astronomy
Genetics
Molecular Biology
Biochemistry
Chemistry
Physics
Atomistic Simulations of Deep Submicron Interconnect Metallization
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Apodized Phase Mask Coronagraphs for Arbitrary Apertures
Astronomy and Astrophysics
Astrophysics
Astronomy
Planetary Science
Space
Design and Manufacturing of a Multi-Zone Phase-Shifting Coronagraph Mask for Extremely Large Telescopes
Astronomy and Astrophysics
Astrophysics
Astronomy
Planetary Science
Space
Reliability-Driven CAD System for Deep-Submicron VLSI Circuits
