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Publications by M. Anderle
Amorphous Carbon Film Growth on Si: Correlation Between Stress and Generation of Defects Into the Substrate
Applied Physics Letters
Astronomy
Physics
Thin-Film Transformations and Volatile Products in the Formation of Nanoporous Low-K Polymethylsilsesquioxane-Based Dielectric
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Role of Implantation-Induced Defects in Surface-Oriented Diffusion of Fluorine in Silicon
Materials Science Forum
Ultra Shallow Depth Profiling by Secondary Ion Mass Spectrometry Techniques
AIP Conference Proceedings
Astronomy
Physics