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Publications by M. Bersani

Boron Deactivation in Preamorphized Silicon on Insulator: Efficiency of the Buried Oxide as an Interstitial Sink

Applied Physics Letters

English

Thin-Film Transformations and Volatile Products in the Formation of Nanoporous Low-K Polymethylsilsesquioxane-Based Dielectric

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

English