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Publications by M. Gaitan
Hybrid Postprocessing Etching for CMOS-compatible MEMS
Journal of Microelectromechanical Systems
Electronic Engineering
Electrical
Mechanical Engineering
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Solution Control for Hybrid Microcircuit Etching
Optimized Piranha Etching Process for SU8-based MEMS and MOEMS Construction
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CMOS-Memristor Hybrid Nanoelectronics for AES Encryption
Reactive Ion Etching of PECVD Silicon Dioxide (SiO2) Layer for MEMS Application
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