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Publications by M. H. Reilly
Ca Test of Al2O3 Gas Diffusion Barriers Grown by Atomic Layer Deposition on Polymers
Applied Physics Letters
Astronomy
Physics
Related publications
UV-enhanced Atomic Layer Deposition of Al2O3thin Films at Low Temperature for Gas-Diffusion Barriers
RSC Advances
Chemistry
Chemical Engineering
Impact of Postdeposition Annealing Upon Film Properties of Atomic Layer Deposition-Grown Al2O3 on GaN
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Surfaces
Electronic Engineering
Condensed Matter Physics
Instrumentation
Electronic
Optical
Materials Chemistry
Electrical
Magnetic Materials
Films
Process Chemistry
Coatings
Technology
Negative Charge Trapping Effects in Al2O3 Films Grown by Atomic Layer Deposition Onto Thermally Oxidized 4h-SiC
AIP Advances
Nanotechnology
Astronomy
Physics
Nanoscience
Al2O3 Underlayer Prepared by Atomic Layer Deposition for Efficient Perovskite Solar Cells
ChemSusChem
Environmental Chemistry
Energy
Chemical Engineering
Materials Science
Silicon Diffusion Control in Atomic-Layer-Deposited Al2O3/La2O3/Al2O3 Gate Stacks Using an Al2O3 Barrier Layer
Nanoscale Research Letters
Materials Science
Nanotechnology
Condensed Matter Physics
Nanoscience
Study on Deposition of Al2O3 Films by Plasma-Assisted Atomic Layer With Different Plasma Sources
Plasma Science and Technology
Condensed Matter Physics
Effects of Seed Layer and Thermal Treatment on Atomic Layer Deposition-Grown Tin Oxide
Transactions on Electrical and Electronic Materials
Electronic Engineering
Optical
Electrical
Magnetic Materials
Electronic
Initial Growth Study of Atomic-Layer Deposition of Al2O3 by Vibrational Sum-Frequency Generation
Aluminum Nitride Transition Layer for Power Electronics Applications Grown by Plasma-Enhanced Atomic Layer Deposition
Materials
Materials Science
Condensed Matter Physics
