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Publications by M. Haverlag

Production and Destruction of CFx Radicals in Radio‐frequency Fluorocarbon Plasmas

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Condensed Matter Physics

English

Related publications

Solid Particle Production in Fluorocarbon Plasmas. I. Correlation With Polymer Film Deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Condensed Matter Physics

English

Time‐resolved Electric Probe Techniques in Radio Frequency Plasmas

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Condensed Matter Physics

English

Dynamics of Ion-Ion Plasmas Under Radio Frequency Bias

Journal of Applied Physics

English

Grounded Radio-Frequency Electrodes in Contact With High Density Plasmas

Physics of Plasmas

Condensed Matter Physics

English

Modeling of Sawtooth Destabilization During Radio‐frequency Heating Experiments in Tokamak Plasmas

Physics of Plasmas

Condensed Matter Physics

English

Transient Propagation Dynamics of Flowing Plasmas Accelerated by Radio-Frequency Electric Fields

Physics of Plasmas

Condensed Matter Physics

English

Modeling of Implantation and Mixing Damage During Etching of SiO2 Over Si in Fluorocarbon Plasmas

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Condensed Matter Physics

English

Energetic Electron Avalanches and Mode Transitions in Planar Inductively Coupled Radio-Frequency Driven Plasmas Operated in Oxygen

Applied Physics Letters

English

Influence of Reactor Wall Conditions on Etch Processes in Inductively Coupled Fluorocarbon Plasmas

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Condensed Matter Physics

English