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Publications by M. L. Green

Evidence of Annealing Effects on a High-Density Si/SiO2 Interfacial Layer

Applied Physics Letters

English

Comment on “Analysis of Hydroxyl Group Controlled Atomic Layer Deposition of Hafnium Oxide From Hafnium Tetrachloride and Water” [J. Appl. Phys. 95, 4777 (2004)]

Journal of Applied Physics

English