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Publications by M. Stühlmeyer
Encapsulation of Implantable Integrated MEMS Pressure Sensors Using Polyimide Epoxy Composite and Atomic Layer Deposition
Journal of Sensors and Sensor Systems
Electronic Engineering
Electrical
Instrumentation
Related publications
Fault Modeling of Implantable MEMS Sensors
Modification of LSF-YSZ Composite Cathodes by Atomic Layer Deposition
Journal of the Electrochemical Society
Surfaces
Condensed Matter Physics
Optical
Electrochemistry
Sustainability
Materials Chemistry
Magnetic Materials
Renewable Energy
Films
Coatings
Electronic
the Environment
Integrated Sustainability Analysis of Atomic Layer Deposition for Microelectronics Manufacturing
Journal of Manufacturing Science and Engineering, Transactions of the ASME
Control
Systems Engineering
Industrial
Mechanical Engineering
Manufacturing Engineering
Computer Science Applications
Thin Film Encapsulation for Organic Light-Emitting Diodes Using Inorganic/Organic Hybrid Layers by Atomic Layer Deposition
Nanoscale Research Letters
Materials Science
Nanotechnology
Condensed Matter Physics
Nanoscience
Atomic Layer Deposition of InN Using Trimethylindium and Ammonia Plasma
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surfaces
Films
Interfaces
Condensed Matter Physics
Coatings
MEMS-Integrated Load Cell for Measuring Pressure, Erosion, and Deposition in Dynamic Environmental Flows
IEEE Sensors Journal
Electronic Engineering
Electrical
Instrumentation
Iridium Wire Grid Polarizer Fabricated Using Atomic Layer Deposition
Nanoscale Research Letters
Materials Science
Nanotechnology
Condensed Matter Physics
Nanoscience
Competition Between Al2O3 Atomic Layer Etching and AlF3 Atomic Layer Deposition Using Sequential Exposures of Trimethylaluminum and Hydrogen Fluoride
Journal of Chemical Physics
Medicine
Theoretical Chemistry
Astronomy
Physics
Physical
Atomic Layer Deposition of Hafnium Oxide Using Anhydrous Hafnium Nitrate
Electrochemical and Solid-State Letters
