Discover open access scientific publications

Search, annotate, share and cite publications

Publications by M.J. Buie

Reactive Ion Etching in the Gaseous Electronics Conference Rf Reference Cell

Journal of Research of the National Institute of Standards and Technology

English

Related publications

Studies of Ion Kinetic-Energy Distributions in the Gaseous Electronics Conference Rf Reference Cell

Journal of Research of the National Institute of Standards and Technology

English

Optical-Emission Spectroscopy on the Gaseous Electronics Conference Rf Reference Cell

Journal of Research of the National Institute of Standards and Technology

English

Current and Voltage Measurements in the Gaseous Electronics Conference Rf Reference Cell

Journal of Research of the National Institute of Standards and Technology

English

One-Dimensional Modeling Studies of the Gaseous Electronics Conference Rf Reference Cell

Journal of Research of the National Institute of Standards and Technology

English

Two-Dimensional Self-Consistent Radio-Frequency Plasma Simulations Relevant to the Gaseous Electronics Conference Rf Reference Cell

Journal of Research of the National Institute of Standards and Technology

English

Reactive Ion Etching of SiGe Alloys Using HBr

Applied Physics Letters

English

Reactive Ion Etching Characteristics of Permalloy Thin Films

Journal of the Magnetics Society of Japan

English

Magneto-Optical Disk Substrate Prepared by Reactive Ion Etching.

English

Reactive Ion Etching of Quartz and Pyrex for Microelectronic Applications

Journal of Applied Physics

English