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Publications by MASATOSHI SATO

Fabrication of Polyurea Resists by Vapor Deposition Polymerization for All Dry Process.

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
1995English

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Process Control in Metalorganic Chemical Vapor Deposition of CdTe

Materials Transactions, JIM
1994English

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Process for Growth of Group-Iv Alloys Containing Tin by Remote Plasma Enhanced Chemical Vapor Deposition

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Chemical-Vapor Deposition of Complex Oxides: Materials and Process Development

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Particle Reduction at Metal Deposition Process in Wafer Fabrication

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Synthesis of SiC Layer on Metal Silicon From SiO by a Chemical Vapor Deposition Process

Journal of the Ceramic Society of Japan
Materials ChemistryChemistryCondensed Matter PhysicsCompositesCeramics
2017English

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