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Publications by Mao-Chieh Chen

Spatial and Energetic Distribution of Border Traps in the Dual-Layer HfO2∕SiO2 High-K Gate Stack by Low-Frequency Capacitance-Voltage Measurement

Applied Physics Letters
AstronomyPhysics
2006English

Dielectric and Barrier Properties of Spin-On Organic Aromatic Low Dielectric Constant Polymers FLARE and SiLK

Journal of the Electrochemical Society
SurfacesCondensed Matter PhysicsOpticalElectrochemistrySustainabilityMaterials ChemistryMagnetic MaterialsRenewable EnergyFilmsCoatingsElectronicthe Environment
2001English

Effects of TaN Substrate Pretreatment by Ar Plasma on Copper Chemical Vapor Deposition

Journal of the Electrochemical Society
SurfacesCondensed Matter PhysicsOpticalElectrochemistrySustainabilityMaterials ChemistryMagnetic MaterialsRenewable EnergyFilmsCoatingsElectronicthe Environment
2002English

Physical and Barrier Properties of PECVD Amorphous Silicon-Oxycarbide From Trimethylsilane and CO[sub 2]

Journal of the Electrochemical Society
SurfacesCondensed Matter PhysicsOpticalElectrochemistrySustainabilityMaterials ChemistryMagnetic MaterialsRenewable EnergyFilmsCoatingsElectronicthe Environment
2004English

Physical and Electrical Characteristics of F- And C-Doped Low Dielectric Constant Chemical Vapor Deposited Oxides

Journal of the Electrochemical Society
SurfacesCondensed Matter PhysicsOpticalElectrochemistrySustainabilityMaterials ChemistryMagnetic MaterialsRenewable EnergyFilmsCoatingsElectronicthe Environment
2001English

Effects of the Underlayer Substrates on Copper Chemical Vapor Deposition

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2002English

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