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Publications by Mark J. Kushner

Electron Collisions With Atoms, Ions, Molecules, and Surfaces: Fundamental Science Empowering Advances in Technology

Proceedings of the National Academy of Sciences of the United States of America

Multidisciplinary

English

High Energy Electron Fluxes in Dc-Augmented Capacitively Coupled Plasmas. II. Effects on Twisting in High Aspect Ratio Etching of Dielectrics

Journal of Applied Physics

English

Experimental and Modeling Analysis of Fast Ionization Wave Discharge Propagation in a Rectangular Geometry

Physics of Plasmas

Condensed Matter Physics

English

Modeling of Implantation and Mixing Damage During Etching of SiO2 Over Si in Fluorocarbon Plasmas

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Condensed Matter Physics

English

Monte Carlo‐fluid Hybrid Model of the Accumulation of Dust Particles at Sheath Edges in Radio‐frequency Discharges

Applied Physics Letters

English

Continuous-Wave Laser Oscillation on the 1315nm Transition of Atomic Iodine Pumped by O2(a1Δ) Produced in an Electric Discharge

Applied Physics Letters

English

Regimes of Particle Trapping in Inductively Coupled Plasma Processing Reactors

Applied Physics Letters

English

Simulation of the Shielding of Dust Particles in Low Pressure Glow Discharges

Applied Physics Letters

English

Pulsed Inductively Coupled Plasmas as a Method to Recoup Uniformity: Three-Dimensional Modeling Study

Applied Physics Letters

English

Translationally Hot Neutrals in Etching Discharges

Journal of Applied Physics

English