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Publications by Mark Pallay

Merging Parallel-Plate and Levitation Actuators to Enable Linearity and Tunability in Electrostatic MEMS

Journal of Applied Physics

English

Related publications

Experimental Characterization of the Electrostatic Levitation Force in MEMS Transducers

Journal of Vibration and Acoustics, Transactions of the ASME

Mechanics of Materials

Mechanical Engineering

English

An Analysis of Electrostatic Interactions in Parallel-Plate MEMS With an Electrode Offset

Proceedings of the Russian higher school Academy of sciences

English

Pulse Drive and Capacitance Measurement Circuit for MEMS Electrostatic Actuators

Analog Integrated Circuits and Signal Processing

Signal Processing

English

Smart Drivers for Online Diagnosis of Electrostatic MEMS Actuators

English

Topology Optimization of Electrostatic MEMS

English

Analysis of Linearity Deterioration in Multidevice RF MEMS Circuits

IEEE Transactions on Electron Devices

Electronic Engineering

Magnetic Materials

English

MEMS Electrostatic Actuation in Conducting Biological Media

Journal of Microelectromechanical Systems

Electronic Engineering

Mechanical Engineering

English

Using Dynamic Voltage Drive in a Parallel-Plate Electrostatic Actuator for Full-Gap Travel Range and Positioning

Journal of Microelectromechanical Systems

Electronic Engineering

Mechanical Engineering

English

Verification of a Charging Potential Measurement Method Using a Parallel Plate Electrostatic Analyzer

TRANSACTIONS OF THE JAPAN SOCIETY FOR AERONAUTICAL AND SPACE SCIENCES, AEROSPACE TECHNOLOGY JAPAN

English