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Publications by Markku Sopanen

Atomic Layer Etching of Gallium Nitride (0001)

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Condensed Matter Physics

English

Ga-Vacancy Activation Under Low Energy Electron Irradiation in GaN-based Materials

Materials Research Society Symposium - Proceedings

Mechanics of Materials

Materials Science

Condensed Matter Physics

Mechanical Engineering

English