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Publications by Marta Clement

Influence of Crystal Quality on the Excitation and Propagation of Surface and Bulk Acoustic Waves in Polycrystalline AlN Films

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
InstrumentationAcousticsUltrasonicsElectricalElectronic Engineering
2012English

Effects of Post-Deposition Vacuum Annealing on the Piezoelectric Properties of AlScN Thin Films Sputtered on 200 Mm Production Wafers

2018English

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