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Publications by Masuhisa YABUKI
Effects of Species of Gases and Change in Clearances on the Pumping Performance of a Scroll Vacuum Pump
SHINKU
Pumping Performance of a Turbomolecular Pump Considering the Surface Roughness of the Blades
Nihon Kikai Gakkai Ronbunshu, B Hen/Transactions of the Japan Society of Mechanical Engineers, Part B
Condensed Matter Physics
Mechanical Engineering
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A Study of a Wet Vacuum Pump
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Effect of Adsorbed Water Molecule on Vacuum Pumping Process
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Surfaces
Instrumentation
Interfaces
Spectroscopy
Materials Science