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Publications by Matthew Holmes
Optimized Piranha Etching Process for SU8-based MEMS and MOEMS Construction
Journal of Micromechanics and Microengineering
Mechanics of Materials
Electronic Engineering
Mechanical Engineering
Nanoscience
Optical
Electrical
Magnetic Materials
Nanotechnology
Electronic
Related publications
Wet Process Innovation Based on Micro/Nano Science: Controllable Anisotropy in Silicon Etching for MEMS 3D Structuring
Hybrid Postprocessing Etching for CMOS-compatible MEMS
Journal of Microelectromechanical Systems
Electronic Engineering
Electrical
Mechanical Engineering
Special Issue on Design, Test, Integration and Packaging of MEMS/MOEMS, 2011
Microsystem Technologies
Electronic Engineering
Condensed Matter Physics
Nanoscience
Hardware
Optical
Electrical
Architecture
Magnetic Materials
Nanotechnology
Electronic
Low Cost SU8 Based Above IC Process for High-Q RF Power Inductors Integration
Advanced Materials Research
Optimized Codebook Construction and Assignment for Product Quantization-Based Approximate Nearest Neighbor Search
IPSJ Transactions on Computer Vision and Applications
Computer Vision
Pattern Recognition
SystemC-based Cosimulation for Global Validation of MOEMS
Reactive Ion Etching: Optimized Diamond Membrane Fabrication for Transmission Electron Microscopy
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Surfaces
Electronic Engineering
Condensed Matter Physics
Instrumentation
Electronic
Optical
Materials Chemistry
Electrical
Magnetic Materials
Films
Process Chemistry
Coatings
Technology
Reactive Ion Etching of PECVD Silicon Dioxide (SiO2) Layer for MEMS Application
Optical Fiber Immunosensors Optimized With Cladding Etching and ITO Nanodeposition
