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Publications by Matthias D. Galus
Replication of Diffractive-Optical Arrays via Photocurable Nanoimprint Lithography
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Related publications
Soft Photocurable Nanoimprint Lithography for Compound Semiconductor Nanostructures
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Nanoimprint Lithography: Full Wafer Replication of Nanometer Features
Fabrication and Replication of Re-Entrant Structures by Nanoimprint Lithography Methods
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Surfaces
Electronic Engineering
Condensed Matter Physics
Instrumentation
Electronic
Optical
Materials Chemistry
Electrical
Magnetic Materials
Films
Process Chemistry
Coatings
Technology
Au Nanostructure Arrays for Plasmonic Applications: Annealed Island Films Versus Nanoimprint Lithography
Nanoscale Research Letters
Materials Science
Nanotechnology
Condensed Matter Physics
Nanoscience
In Situ Real Time Process Characterization in Nanoimprint Lithography Using Time-Resolved Diffractive Scatterometry
Applied Physics Letters
Astronomy
Physics
Gold Nanopost-Shell Arrays Fabricated by Nanoimprint Lithography as a Flexible Plasmonic Sensing Platform
Nanomaterials
Materials Science
Chemical Engineering
Advanced Solutions for Nanoimprint Lithography
Nanoindustry Russia
Nanoimprint Lithography and Future Patterning for Semiconductor Devices
Journal of Micro/ Nanolithography, MEMS, and MOEMS
Electronic Engineering
Condensed Matter Physics
Mechanical Engineering
Electronic
Molecular Physics,
Nanoscience
Optical
Electrical
Atomic
Magnetic Materials
Nanotechnology
Optics
Metal Hierarchical Patterning by Direct Nanoimprint Lithography
Scientific Reports
Multidisciplinary
