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Publications by Michiru YAMASHITA

Fabrication of Spiral Micro-Coil Utilizing LIGA Process

JSME International Journal Series A

English

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Micro-Fabrication of High-Thickness Spiral Inductors for the Remote Powering of Implantable Biosensors

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UV-LIGA Microfabrication Process for Sub-Terahertz Waveguides Utilizing Multiple Layered SU-8 Photoresist

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Micro-Fabrication on Glass Surface Using Micro-Indentation and Wet Etching Process

Journal of The Adhesion Society of Japan

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Fabrication of Wireless Micro Pressure Sensor Using the CMOS Process

Instrumentation

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A Micro-Undulator Fabricated by LIGA Processes

IEEE Transactions on Magnetics

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The Liga Process. Micromachining Techniques.

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Design, Fabrication and Testing of a Dual-Range XY Micro-Motion Stage Driven by Voice Coil Actuators

Advances in Science, Technology and Engineering Systems

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Fabrication of YSZ-based Micro Tubular SOFC Single Cell Using Electrophoretic Deposition Process

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Fabrication and Characterization of 3-Dof Soft-Contact Tactile Sensor Utilizing 3-Dof Micro Force Moment Sensor

IEEJ Transactions on Sensors and Micromachines

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