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Publications by Mingmei Wang

High Energy Electron Fluxes in Dc-Augmented Capacitively Coupled Plasmas. II. Effects on Twisting in High Aspect Ratio Etching of Dielectrics

Journal of Applied Physics
AstronomyPhysics
2010English

Modeling of Implantation and Mixing Damage During Etching of SiO2 Over Si in Fluorocarbon Plasmas

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2011English

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High Aspect Ratio Etching of Atomic Force Microscope-Patterned Nitrided Silicon

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The Study of Latex Sphere Lithography for High Aspect Ratio Dry Silicon Etching

Physica Status Solidi (A) Applications and Materials Science
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Research Opportunities in High Energy Density Laboratory Plasmas on the NDCX-II Facility

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Effects of Augmented Delivery of Pyruvate on Myocardial High-Energy Phosphate Metabolism at High Workstate

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The Effect of Realistic Heavy Particle Induced Secondary Electron Emission Coefficients on the Electron Power Absorption Dynamics in Single- And Dual-Frequency Capacitively Coupled Plasmas

Plasma Sources Science and Technology
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Carcinogenic Potential of High Aspect Ratio Carbon Nanomaterials

Environmental Science: Nano
Materials ScienceEnvironmental Science
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Injection Compression Molding of High-Aspect-Ratio Nanostructures

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