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Publications by Minseung Ahn

Fabrication of Ultrahigh Aspect Ratio Freestanding Gratings on Silicon-On-Insulator Wafers

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

English

Fabrication of 200nm Period Blazed Transmission Gratings on Silicon-On-Insulator Wafers

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

English

Related publications

Potassium Hydroxide Polishing of Nanoscale Deep Reactive-Ion Etched Ultrahigh Aspect Ratio Gratings

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Electronic Engineering

Condensed Matter Physics

Instrumentation

Materials Chemistry

Magnetic Materials

Process Chemistry

English

Fabrication of Ultra-Thin Strained Silicon on Insulator

Journal of Electronic Materials

Electronic Engineering

Condensed Matter Physics

Materials Chemistry

Magnetic Materials

English

Strained Silicon-On-Insulator - Fabrication and Characterization

English

Bonding Silicon-On-Insulator to Glass Wafers for Integrated Bio-Electronic Circuits

Applied Physics Letters

English

UV-based Nano Imprint Fabrication of Gold Grating Couplers on Silicon-On-Insulator

2007 Digest of the IEEE/LEOS Summer Topical Meetings

English

Catalyst Self-Assembly for Scalable Patterning of Sub 10 Nm Ultrahigh Aspect Ratio Nanopores in Silicon

ACS Applied Materials & Interfaces

Materials Science

English

Ultrahigh-Resolution Spectrometer Based on 19 Integrated Gratings

Scientific Reports

Multidisciplinary

English

Bandpass Integrated Bragg Gratings in Silicon-On-Insulator With Well-Controlled Amplitude and Phase Responses

Molecular Physics,

English