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Publications by N. Hellgren

Epitaxial Growth of Metastable Δ-TaN Layers on MgO(001) Using Low-Energy, High-Flux Ion Irradiation During Ultrahigh Vacuum Reactive Magnetron Sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2002English

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