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Publications by N.F. de Rooij

Design and Fabrication of an Overhanging Xy-Microactuator With Integrated Tip for Scanning Surface Profiling

Sensors and Actuators, A: Physical
SurfacesElectronic EngineeringAlloysCondensed Matter PhysicsInstrumentationMetalsOpticalElectricalMagnetic MaterialsFilmsCoatingsElectronic
1994English

Micromachined Silicon Cantilevers and Tips for Scanning Probe Microscopy

Microelectronic Engineering
SurfacesElectronic EngineeringCondensed Matter PhysicsElectronicMolecular Physics,NanoscienceOpticalElectricalAtomicMagnetic MaterialsFilmsNanotechnologyOpticsCoatings
1991English

Scalable Cascaded Snap-In Actuators for Large-Stroke Displacements

2009English

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