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Publications by Naokichi HOSOKAWA

Step Coverage of Al Films Prepared by DC Magnetron Sputtering Using the Dual-Structure Target.

English

Simulation of Erosion Rate Distribution on a Target Used in a Magnetron Sputtering System.

English

Characteristics of Silicide Thin Films Prepared by Sputtering Using Hot Pressed Target.

English

Sputtering: History and Applications.

Journal of the Metal Finishing Society of Japan

English