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Publications by Natalya Kaurova
Method for Determination of Resists Parameters for Photonic - Integrated Circuits E-Beam Lithography on Silicon Nitride Platform
EPJ Web of Conferences
Astronomy
Physics
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Silicon and Hybrid Silicon Photodetectors for Photonic Integrated Circuits
Silicon-Organic Hybrid Fabrication Platform for Integrated Circuits
Low-Loss Si Waveguides With Variable-Shaped-Beam EB Lithography for Large-Scaled Photonic Circuits
Photonic Integrated Circuits
Photonics Russia
Method for Fabricating Submicron Silicide Structures on Silicon Using a Resistless Electron Beam Lithography Process
Applied Physics Letters
Astronomy
Physics
Near-Infrared Grating Couplers for Silicon Nitride Photonic Wires
IEEE Photonics Technology Letters
Electronic Engineering
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Atomic
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Silicon Photonic Integrated Devices for Optical Interconnects
Integrated Optic Platform for Photonic Crystal Devices
Low Loss InP Membrane Photonic Integrated Circuits Enabled by 193-Nm Deep UV Lithography