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Publications by Natalya Kaurova
Method for Determination of Resists Parameters for Photonic - Integrated Circuits E-Beam Lithography on Silicon Nitride Platform
EPJ Web of Conferences
Astronomy
Physics
Related publications
Silicon and Hybrid Silicon Photodetectors for Photonic Integrated Circuits
Silicon-Organic Hybrid Fabrication Platform for Integrated Circuits
Low-Loss Si Waveguides With Variable-Shaped-Beam EB Lithography for Large-Scaled Photonic Circuits
Photonic Integrated Circuits
Photonics Russia
Method for Fabricating Submicron Silicide Structures on Silicon Using a Resistless Electron Beam Lithography Process
Applied Physics Letters
Astronomy
Physics
Near-Infrared Grating Couplers for Silicon Nitride Photonic Wires
IEEE Photonics Technology Letters
Electronic Engineering
Optics
Molecular Physics,
Optical
Electrical
Atomic
Magnetic Materials
Electronic
Silicon Photonic Integrated Devices for Optical Interconnects
Integrated Optic Platform for Photonic Crystal Devices
Low Loss InP Membrane Photonic Integrated Circuits Enabled by 193-Nm Deep UV Lithography
