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Publications by Nikolaos Kehagias

Fabrication and Replication of Re-Entrant Structures by Nanoimprint Lithography Methods

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Electronic Engineering

Condensed Matter Physics

Instrumentation

Materials Chemistry

Magnetic Materials

Process Chemistry

English

Related publications

Fabrication of 5nm Linewidth and 14nm Pitch Features by Nanoimprint Lithography

Applied Physics Letters

English

Nanoimprint Lithography: Full Wafer Replication of Nanometer Features

English

Replication of Diffractive-Optical Arrays via Photocurable Nanoimprint Lithography

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

English

Impact of Wafer Deformation on Pattern Fabrication for Thermal Nanoimprint Lithography

Journal of Photopolymer Science and Technology

Organic Chemistry

Materials Chemistry

English

Fabrication of Submicron Structures by Three-Dimensional Laser Lithography

English

Metal Hierarchical Patterning by Direct Nanoimprint Lithography

Scientific Reports

Multidisciplinary

English

Wafer Scale Coating of Polymer Cantilever Fabricated by Nanoimprint Lithography

English

Advanced Solutions for Nanoimprint Lithography

Nanoindustry Russia

English

Crystallization of Poly(ethylene Oxide) Patterned by Nanoimprint Lithography

English