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Publications by Otmar Ertl
Three-Dimensional Topography Simulation Using Advanced Level Set and Ray Tracing Methods
Three-Dimensional Plasma Etching Simulation Using Advanced Ray Tracing and Level Set Techniques
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Efficient Coupling of Monte Carlo and Level Set Methods for Topography Simulation
Three-Dimensional X-Ray Topography and Its Applications
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Dislocation Climb Strengthening in Systems With Immobile Obstacles: Three-Dimensional Level-Set Simulation Study
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Rigorous Three-Dimensional Photoresist Exposure and Development Simulation Over Nonplanar Topography
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
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Level Set Methods for Simulation of Thin Film Growth
An Accelerated and Accurate Three-Dimensional Ray Tracing Using Red-Black Tree With Facet Mining and Object Bouncing Techniques
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Three-Dimensional Topography Simulation Research of Diamond-Wire Sawing Based on Matlab
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A Three-Dimensional Gaussian-Beam Ray-Tracing Program for Designing Interferometer/Polarimeter Plasma Diagnostics
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