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Publications by P. J. Matsuo

Remote Plasma Etching of Silicon Nitride and Silicon Dioxide Using NF3/O2 Gas Mixtures

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Condensed Matter Physics

English

Characterization of Al, Cu, and TiN Surface Cleaning Following a Low-K Dielectric Etch

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

English