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Publications by Patrick Naulleau

EUV Lithography

Synchrotron Radiation News
High Energy PhysicsNuclearOpticsAtomicMolecular Physics,
2019English

Preparing for the Next Generation of EUV Lithography at the Center for X-Ray Optics

Synchrotron Radiation News
High Energy PhysicsNuclearOpticsAtomicMolecular Physics,
2019English

Relative Importance of Various Stochastic Terms and EUV Patterning

Journal of Micro/ Nanolithography, MEMS, and MOEMS
Electronic EngineeringCondensed Matter PhysicsMechanical EngineeringElectronicMolecular Physics,NanoscienceOpticalElectricalAtomicMagnetic MaterialsNanotechnologyOptics
2018English

Overview and Status of the 0.5NA EUV Microfield Exposure Tool at Berkeley Lab

2019English

Interferometric At-Wavelength Flare Characterization of Extreme Ultraviolet Optical Systems

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
1999English

Extreme Ultraviolet Alignment and Testing of a Four-Mirror Ring Field Extreme Ultraviolet Optical System

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2000English

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