Discover open access scientific publications

Search, annotate, share and cite publications

Publications by Paul K. Chu

Interfacial Compound Suppression and Dielectric Properties Enhancement of F–N Codoped ZrO2 Thin Films

Applied Physics Letters
AstronomyPhysics
2007English

Plasma Hydrogenation of Strain-Relaxed SiGe∕Si Heterostructure for Layer Transfer

Applied Physics Letters
AstronomyPhysics
2004English

Thermal Stability of Diamondlike Carbon Buried Layer Fabricated by Plasma Immersion Ion Implantation and Deposition in Silicon on Insulator

Journal of Applied Physics
AstronomyPhysics
2005English

Experimental Investigation of Hybrid-Evaporation-Glow Discharge Plasma Immersion Ion Implantation

Journal of Applied Physics
AstronomyPhysics
2005English

Transport Efficiency of Vacuum Arc Plasma in a Curved Magnetic Filter

Review of Scientific Instruments
MedicineInstrumentation
2005English

Enhancement of Implantation Energy Using a Conducting Grid in Plasma Immersion Ion Implantation of Dielectric/Polymeric Materials

Review of Scientific Instruments
MedicineInstrumentation
2003English

A Ground-Based Radio Frequency Inductively Coupled Plasma Apparatus for Atomic Oxygen Simulation in Low Earth Orbit

Review of Scientific Instruments
MedicineInstrumentation
2007English

Hydrogen-Induced Surface Blistering of Sample Chuck Materials in Hydrogen Plasma Immersion Ion Implantation

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2001English

Thermal Annealing Effects on the Structure and Electrical Properties of Al[sub 2]O[sub 3] Gate Dielectrics on Fully Depleted SiGe on Insulator

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2006English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2025 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy