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Publications by Pengshuai Ren
Fabrication of Long Range Surface Plasmon Polariton Biosensors Incorporating a Channel Etch Stop Layer and Wafer Bonded Cover
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Fabrication of Long Range Surface Plasmon Polariton Biosensors Incorporating Optical Waveguides and Encapsulated Microfluidic Channels via Wafer Bonding"
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Fabrication of Capacitive Micromachined Ultrasonic Transducers Using a Boron Etch-Stop Method
