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Publications by Petro Deminskyi

Atomic Layer Deposition of InN Using Trimethylindium and Ammonia Plasma

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Condensed Matter Physics

English

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Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide

Nanoscale Research Letters

Materials Science

Condensed Matter Physics

English

Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Condensed Matter Physics

English

Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition

Journal of the Electrochemical Society

Condensed Matter Physics

Electrochemistry

Materials Chemistry

Magnetic Materials

Renewable Energy

the Environment

English

Iridium Wire Grid Polarizer Fabricated Using Atomic Layer Deposition

Nanoscale Research Letters

Materials Science

Condensed Matter Physics

English

Comparison of Thermal and Plasma-Enhanced Atomic Layer Deposition of Niobium Oxide Thin Films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Condensed Matter Physics

English

Competition Between Al2O3 Atomic Layer Etching and AlF3 Atomic Layer Deposition Using Sequential Exposures of Trimethylaluminum and Hydrogen Fluoride

Journal of Chemical Physics

Theoretical Chemistry

English

Study on Property of Atomic Layer Epitaxy Growth of InN by Using Indium Chloride

Journal of Advanced Science

English

Study on Deposition of Al2O3 Films by Plasma-Assisted Atomic Layer With Different Plasma Sources

Plasma Science and Technology

Condensed Matter Physics

English

Atomic Layer Deposition of Hafnium Oxide Using Anhydrous Hafnium Nitrate

Electrochemical and Solid-State Letters

English