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Publications by Phil Seidel
EUV Mask Blank Fabrication & Metrology
AIP Conference Proceedings
Astronomy
Physics
Related publications
Overcoming Mask Blank Defects in EUV Lithography
SPIE Newsroom
Estimated Costing of an EUV Mask Inspection Microscope
22X Mask Cleaning Effects on EUV Lithography Process and Lifetime
Fabrication of Freeform Mirrors: Metrology and Figuring
Fabrication and Testing of Optics for EUV Projection Lithography
Square-Aperture Microlens Array Fabrication by the Moving Mask Technology
DEStech Transactions on Engineering and Technology Research
The Blank
The Iowa Review
Fabrication of Tailored Bragg Gratings by the Phase Mask Dithering/Moving Technique
Photonic Sensors
Optics
Molecular Physics,
Optical
Atomic
Magnetic Materials
Electronic
Blank Silence
Critique d’art