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Publications by Phil Seidel

EUV Mask Blank Fabrication & Metrology

AIP Conference Proceedings
AstronomyPhysics
2003English

Related publications

Overcoming Mask Blank Defects in EUV Lithography

SPIE Newsroom
2009English

Estimated Costing of an EUV Mask Inspection Microscope

2002English

22X Mask Cleaning Effects on EUV Lithography Process and Lifetime

2011English

Fabrication of Freeform Mirrors: Metrology and Figuring

2009English

Fabrication and Testing of Optics for EUV Projection Lithography

1998English

Square-Aperture Microlens Array Fabrication by the Moving Mask Technology

DEStech Transactions on Engineering and Technology Research
2018English

The Blank

The Iowa Review
2009English

Fabrication of Tailored Bragg Gratings by the Phase Mask Dithering/Moving Technique

Photonic Sensors
OpticsMolecular Physics,OpticalAtomicMagnetic MaterialsElectronic
2012English

Blank Silence

Critique d’art
2000English

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