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Publications by Qinwo Shen

Thermal Stability of Diamondlike Carbon Buried Layer Fabricated by Plasma Immersion Ion Implantation and Deposition in Silicon on Insulator

Journal of Applied Physics

English

Thermal Annealing Effects on the Structure and Electrical Properties of Al[sub 2]O[sub 3] Gate Dielectrics on Fully Depleted SiGe on Insulator

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

English