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Publications by Qinwo Shen

Thermal Stability of Diamondlike Carbon Buried Layer Fabricated by Plasma Immersion Ion Implantation and Deposition in Silicon on Insulator

Journal of Applied Physics

English

Thermal Annealing Effects on the Structure and Electrical Properties of Al[sub 2]O[sub 3] Gate Dielectrics on Fully Depleted SiGe on Insulator

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

English

Related publications

Metal Plasma Immersion Ion Implantation and Deposition: A Review

Surface and Coatings Technology

Condensed Matter Physics

Materials Chemistry

English

Investigation of Silicon on Insulator Fabricated by Two-Step O+ Implantation

Chinese Science Bulletin

English

Surface Modification of Biomaterials Using Plasma Immersion Ion Implantation and Deposition

Interface Focus

Biomedical Engineering

English

From Plasma Immersion Ion Implantation to Deposition: A Historical Perspective on Principles and Trends

Surface and Coatings Technology

Condensed Matter Physics

Materials Chemistry

English

Plasma Immersion Ion Implantation With Lithium Ions

English

3D Free-Form Patterning of Silicon by Ion Implantation, Silicon Deposition, and Selective Silicon Etching

Advanced Functional Materials

Materials Science

Condensed Matter Physics

Electrochemistry

Magnetic Materials

English

Nitrogen Incorporation Into Hafnium Oxide Films by Plasma Immersion Ion Implantation

Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

English

Magnetic Field Effect on the Sheath Thickness in Plasma Immersion Ion Implantation

Applied Physics Letters

English

Antibacterial Property and Biocompatibility of Polypyrrole Films Treated by Oxygen Plasma Immersion Ion Implantation

Advanced Materials Interfaces

Mechanics of Materials

Mechanical Engineering

English