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Publications by R Dussart

Highly Sensitive Measurements of the Energy Transferred During Plasma Sputter Deposition of Metals

Journal of Physics D: Applied Physics

Condensed Matter Physics

Magnetic Materials

English

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Thermal Probe Measurements of Energy Flux Onto a Substrate During ICP Assisted Sputter-Deposition

English

X-Ray Reflectivity Study on Gold Films During Sputter Deposition

Surface Science

Condensed Matter Physics

Materials Chemistry

English

Modelling of Reactive Sputter Deposition of Oxynitrides

English

A New Highly Automated Sputter Equipment for in Situ Investigation of Deposition Processes With Synchrotron Radiation

Review of Scientific Instruments

Instrumentation

English

Magnetically Controlled Deposition of Metals Using Gas Plasma. Final Report

English

Electrical Characterization of Defects Introduced During Sputter Deposition of Tungsten on N Type 4 H -SiC

Materials Science in Semiconductor Processing

Mechanics of Materials

Materials Science

Condensed Matter Physics

Mechanical Engineering

English

Comparison of Mechanical Properties and Composition of Magnetron Sputter and Plasma Enhanced Atomic Layer Deposition Aluminum Nitride Films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Condensed Matter Physics

English

Sputter Deposition of Anatase Titanum Dioxide Transparent Conducting Films

Journal of the Vacuum Society of Japan

Instrumentation

Materials Science

English

Utilization of Water Vapor for Sputter Deposition of Thin Films

Journal of the Vacuum Society of Japan

Instrumentation

Materials Science

English