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Publications by R. Engeln

Direct and Highly Sensitive Measurement of Defect-Related Absorption in Amorphous Silicon Thin Films by Cavity Ringdown Spectroscopy

Applied Physics Letters
AstronomyPhysics
2004English

In Situ Reaction Mechanism Studies of Plasma-Assisted Atomic Layer Deposition of Al2O3

Applied Physics Letters
AstronomyPhysics
2006English

Detailed Study of the Plasma-Activated Catalytic Generation of Ammonia in N2-H2 Plasmas

Journal of Applied Physics
AstronomyPhysics
2007English

Inflow and Shock Formation in Supersonic, Rarefied Plasma Expansions

Physics of Plasmas
Condensed Matter Physics
2005English

Density and Production of NH and NH2 in an Ar–NH3 Expanding Plasma Jet

Journal of Applied Physics
AstronomyPhysics
2005English

N, NH, and NH2 Radical Densities in a Remote Ar–NH3–SiH4 Plasma and Their Role in Silicon Nitride Deposition

Journal of Applied Physics
AstronomyPhysics
2006English

Modeling and Experiments on Differential Pumping in Linear Plasma Generators Operating at High Gas Flows

Journal of Applied Physics
AstronomyPhysics
2009English

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