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Publications by R. H. Chan

Optimizing the Reactive Ion Etching of P-InGaP With CH4/H2 by a Two-Level Fractional Factorial Design Process

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
1996English

Related publications

Magneto-Optical Disk Substrate Prepared by Reactive Ion Etching.

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1985English

Modelling and Optimization of the Technology Process by Ion Beam Etching

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Reactive Ion Etching of SiGe Alloys Using HBr

Applied Physics Letters
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1991English

Reactive Ion Etching Characteristics of Permalloy Thin Films

Journal of the Magnetics Society of Japan
1999English

Optimization of Biomass Pretreatments Using Fractional Factorial Experimental Design

Biotechnology for Biofuels
Applied MicrobiologyManagementMonitoringRenewable EnergyEnergySustainabilityPolicyBiotechnologyLawthe Environment
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Author Correction: Two-Level Factorial Experiments

Nature Methods
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2019English

Formation of Metal Nanoparticles by Short-Distance Sputter Deposition in a Reactive Ion Etching Chamber

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The M-P Inverse for the Balanced Factorial Design With Interactions

Journal of the Japanese Society of Computational Statistics
1990English

Reactive Ion Etching of Quartz and Pyrex for Microelectronic Applications

Journal of Applied Physics
AstronomyPhysics
2002English

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