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Publications by R. Matson
The Use of Electron Channeling Patterns for Process Optimization of Low-Temperature Epitaxial Silicon Using Hot-Wire Chemical Vapor Deposition
Materials Research Society Symposium - Proceedings
Mechanics of Materials
Materials Science
Condensed Matter Physics
Mechanical Engineering
Related publications
Low-Temperature Chemical-Vapor-Deposition of Silicon Nitride
Le Journal de Physique IV
Optimization of Deposition Parameters for Thin Silicon Films on Flexible Substrates in a Hot-Wire Chemical Vapor Deposition Reactor
Materials Science Forum
Doping of Amorphous and Microcrystalline Silicon Films Deposited at Low Substrate Temperatures by Hot-Wire Chemical Vapor Deposition
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surfaces
Films
Interfaces
Condensed Matter Physics
Coatings
Hydrogenated Silicon Carbide Thin Films Prepared With High Deposition Rate by Hot Wire Chemical Vapor Deposition Method
Journal of Coatings
Hot Wire Chemical Vapor Deposition of Isolated Carbon Single-Walled Nanotubes
Applied Physics Letters
Astronomy
Physics
Hot-Wire Polysilicon Waveguides With Low Deposition Temperature
Optics Letters
Optics
Atomic
Molecular Physics,
Low-Temperature, Low-Pressure Chemical Vapor Deposition and Solid Phase Crystallization of Silicon–Germanium Films
Journal of the Electrochemical Society
Surfaces
Condensed Matter Physics
Optical
Electrochemistry
Sustainability
Materials Chemistry
Magnetic Materials
Renewable Energy
Films
Coatings
Electronic
the Environment
Deposition of Microcrystalline Silicon Prepared by Hot-Wire Chemical-Vapor Deposition: The Influence of the Deposition Parameters on the Material Properties and Solar Cell Performance
Journal of Applied Physics
Astronomy
Physics
Microdoping Compensation of Microcrystalline Silicon Obtained by Hot-Wire Chemical Vapour Deposition
Fuel and Energy Abstracts
