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Publications by R.F. Wolffenbuttel

Compliant Capacitive Wrist Sensor for Use in Industrial Robots

IEEE Transactions on Instrumentation and Measurement
Electronic EngineeringElectricalInstrumentation
1990English

Integrated Micromachined Electrostatic True RMS-to-DC Converter

IEEE Transactions on Instrumentation and Measurement
Electronic EngineeringElectricalInstrumentation
1995English

Micromechanical Voltage Reference Using the Pull-In of a Beam

IEEE Transactions on Instrumentation and Measurement
Electronic EngineeringElectricalInstrumentation
2001English

Effects of Plasma Etching Chemistry and Post-Processing on the Mechanical Adhesion and Electrical Contact of Double Polysilicon Layer Structures

IEEE Transactions on Electron Devices
Electronic EngineeringOpticalElectricalMagnetic MaterialsElectronic
1995English

Using Dynamic Voltage Drive in a Parallel-Plate Electrostatic Actuator for Full-Gap Travel Range and Positioning

Journal of Microelectromechanical Systems
Electronic EngineeringElectricalMechanical Engineering
2006English

Analysis and Analytical Modeling of Static Pull-In With Application to MEMS-Based Voltage Reference and Process Monitoring

Journal of Microelectromechanical Systems
Electronic EngineeringElectricalMechanical Engineering
2004English

Single-Chip CMOS Optical Microspectrometer

Sensors and Actuators, A: Physical
SurfacesElectronic EngineeringAlloysCondensed Matter PhysicsInstrumentationMetalsOpticalElectricalMagnetic MaterialsFilmsCoatingsElectronic
2000English

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