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Publications by Ralf K. Heilmann

Simulations of Film Stress Effects on Mirror Segments for the Lynx X-Ray Observatory Concept

Journal of Astronomical Telescopes, Instruments, and Systems
ControlSystems EngineeringMechanical EngineeringInstrumentationSpaceOpticalPlanetary ScienceMagnetic MaterialsAstrophysicsAstronomyElectronic
2019English

Potassium Hydroxide Polishing of Nanoscale Deep Reactive-Ion Etched Ultrahigh Aspect Ratio Gratings

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
SurfacesElectronic EngineeringCondensed Matter PhysicsInstrumentationElectronicOpticalMaterials ChemistryElectricalMagnetic MaterialsFilmsProcess ChemistryCoatingsTechnology
2013English

on the Alignment and Focusing of the Marshall Grazing Incidence X-Ray Spectrometer (MaGIXS)

2016English

Fabrication of Ultrahigh Aspect Ratio Freestanding Gratings on Silicon-On-Insulator Wafers

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2007English

Fabrication of 200nm Period Blazed Transmission Gratings on Silicon-On-Insulator Wafers

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2008English

Microcomb Design and Fabrication for High Accuracy Optical Assembly

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2000English

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