Amanote Research
Register
Sign In
Discover open access scientific publications
Search, annotate, share and cite publications
Publications by Robert L. Bruce
Fluorocarbon Assisted Atomic Layer Etching of SiO2 Using Cyclic Ar/C4f8 Plasma
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surfaces
Films
Interfaces
Condensed Matter Physics
Coatings