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Publications by Robert-H. Munnig Schmidt
Ultra-Precision Engineering in Lithographic Exposure Equipment for the Semiconductor Industry
Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences
Mathematics
Engineering
Astronomy
Physics
Related publications
Optimum Adjustment for Distortion in Semiconductor Lithography Equipment
Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
Mechanics of Materials
Industrial
Mechanical Engineering
Manufacturing Engineering
Chemical Engineering in the Electronics Industry: Progress Towards the Rational Design of Organic Semiconductor Heterojunctions
Current Opinion in Chemical Engineering
Energy
Coupling System for Ultra Precision Machining
Journal of Mechanics Engineering and Automation
Semiconductor Laser Modules for Precision Spectroscopy Applications in Space
Ultra-Thin Semiconductor Films.
Nihon Kessho Gakkaishi
An Ultra-Precision Digitizer for Inertial Systems.
Image Reversal Resist for G-Line Exposure: Chemistry and Lithographic Evaluation.
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Active Hard Mount Vibration Isolation for Precision Equipment
Precision Genome Engineering
Science
Multidisciplinary
Philosophy of Science
History
