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Publications by Ru-Gun Liu
Focus Latitude Enhancement of Symmetrical Phase Mask Design for Deep Submicron Contact Hole Patterning
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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Flying Phase Mask for the Printing of Long Submicron-Period Stitchingless Gratings
Microelectronic Engineering
Surfaces
Electronic Engineering
Condensed Matter Physics
Electronic
Molecular Physics,
Nanoscience
Optical
Electrical
Atomic
Magnetic Materials
Films
Nanotechnology
Optics
Coatings
Design and Assessment of Symmetrical Phase-Shifting Algorithms
Journal of the Optical Society of America A: Optics and Image Science, and Vision
Pattern Recognition
Optics
Molecular Physics,
Computer Vision
Optical
Atomic
Magnetic Materials
Medicine
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Directed Self Assembly Materials for Hole Patterning
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
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Multiple Patterning of Laser Focus Spot Using a Segmented Kinoform Phase Plate
The Review of Laser Engineering
Nanoparticle Chemisorption Printing Technique for Conductive Silver Patterning With Submicron Resolution
Nature Communications
Astronomy
Genetics
Molecular Biology
Biochemistry
Chemistry
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Atomistic Simulations of Deep Submicron Interconnect Metallization
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Apodized Phase Mask Coronagraphs for Arbitrary Apertures
Astronomy and Astrophysics
Astrophysics
Astronomy
Planetary Science
Space
Design and Manufacturing of a Multi-Zone Phase-Shifting Coronagraph Mask for Extremely Large Telescopes
Astronomy and Astrophysics
Astrophysics
Astronomy
Planetary Science
Space
Reliability-Driven CAD System for Deep-Submicron VLSI Circuits
