Amanote Research
Register
Sign In
Discover open access scientific publications
Search, annotate, share and cite publications
Publications by S Kinnunen
Theαandγplasma Modes in Plasma-Enhanced Atomic Layer Deposition With O2–N2capacitive Discharges
Journal of Physics D: Applied Physics
Surfaces
Ultrasonics
Condensed Matter Physics
Acoustics
Optical
Magnetic Materials
Films
Coatings
Electronic