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Publications by S Wilczek
The Effect of Realistic Heavy Particle Induced Secondary Electron Emission Coefficients on the Electron Power Absorption Dynamics in Single- And Dual-Frequency Capacitively Coupled Plasmas
Plasma Sources Science and Technology
Condensed Matter Physics
The Effect of the Driving Frequency on the Confinement of Beam Electrons and Plasma Density in Low-Pressure Capacitive Discharges
Plasma Sources Science and Technology
Condensed Matter Physics
Related publications
Electron Bounce Resonance Heating in Dual-Frequency Capacitively Coupled Oxygen Discharges
Plasma Sources Science and Technology
Condensed Matter Physics
Observations of Electron Energy Distribution Functions and Ion Bombardment Secondary Electrons in a Capacitively Coupled Radio Frequency Plasma
IEEJ Transactions on Fundamentals and Materials
Electronic Engineering
Electrical
The Influence of Electron Reflection/Sticking Coefficients at the Electrodes on Plasma Parameters in Particle-In-Cell Simulations of Capacitive Radio-Frequency Plasmas
Plasma Sources Science and Technology
Condensed Matter Physics
Coupling Effects of Driving Frequencies on the Electron Heating in Electronegative Capacitive Dual-Frequency Plasmas
Journal of Physics D: Applied Physics
Surfaces
Ultrasonics
Condensed Matter Physics
Acoustics
Optical
Magnetic Materials
Films
Coatings
Electronic
Effect of Collisions on Ion Dynamics in Electron‐cyclotron‐resonance Plasmas
Journal of Applied Physics
Astronomy
Physics
Emission of Electron Bernstein Waves in Plasmas
Physics of Plasmas
Condensed Matter Physics
Erratum: “Tailoring the Nonlinear Frequency Coupling Between Odd Harmonics for the Optimisation of Charged Particle Dynamics in Capacitively Coupled Oxygen Plasmas” [Appl. Phys. Lett. 106, 054102 (2015)]
Applied Physics Letters
Astronomy
Physics
High Energy Electron Fluxes in Dc-Augmented Capacitively Coupled Plasmas. II. Effects on Twisting in High Aspect Ratio Etching of Dielectrics
Journal of Applied Physics
Astronomy
Physics
Molecular Dynamics Studies of Electron-Ion Temperature Equilibration in Hydrogen Plasmas Within the Coupled-Mode Regime
Physical review. E
Nonlinear Physics
Probability
Statistics
Condensed Matter Physics
Statistical
